Proceedings of the KIPE Conference (전력전자학회:학술대회논문집)
- 2001.07a
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- Pages.296-297
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- 2001
development system for plat glass cleaning
평판글라스 세정을 위한 시스템 개발에 관한 연구
- Kim, Soo-Yong (Han Gil Telcom CO.) ;
- Lee, Oh-Keol (DongEui. I.T.) ;
- Kim, Sang-Hyo (DongEui. I.T.)
- Published : 2001.07.01
Abstract
In this paper, the minimization of particle wit introduction of face to face to face type in cleaning. Easy input and change of parameter Monitoring function of process data in process function of 3 moving axis. Return Tank for Chem cal solution
Keywords