한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2000년도 제2회 학술대회 논문집 일렉트렛트 및 응용기술전문연구회
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- Pages.45-49
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- 2000
Ozone Dentisity Estimation and Stable Supply in the Growth Process of BSCCO Thin Film
- Lee, Hee-Kab (Department of Electrical & Electronic Eng., Dongshin University) ;
- Park, Yong-Pil (Department of Electrical & Electronic Eng., Dongshin University)
- 발행 : 2000.10.13
초록
An ozone condenser by a selective adsorption on the silica gel surface is constructed. Ozone density is evaluated by three methods; ultraviolet absorption, thermal decomposition and Q-mass analyzing methods. Thermal decomposition method is found to be available to the density evaluation from dilute to highly condensed ozone. The highest ozone density condensed by the adsorption method is evaluated to be 97 mol%.