한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
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- Pages.217-218
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- 2000
Formation of Mo-Silicide on Mo Tip
- Oh, Chang-Woo (Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering, Seoul National University) ;
- Kim, Yoo-Jong (Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering, Seoul National University) ;
- Lee, Jong-Duk (Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering, Seoul National University) ;
- Park, Byung-Gook (Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering, Seoul National University)
- 발행 : 2000.01.13
초록
This paper describes a formation of the Mo-silicide on Mo tip to compare the emission characteristics of the Mo tip. Cone-shaped Mo tip arrays were fabricated and silicidized by evaporating a 15nm-thick a-Si film on Mo tip arrays and annealing it in inert ambient at the temperature of
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