한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
- /
- Pages.155-156
- /
- 2000
In-situ Fluorine Passivation by Excimer Laser Annealing
- Jung, Sang-Hoon (School of Electrical Engineering, Seoul National University) ;
- Kim, Cheon-Hong (School of Electrical Engineering, Seoul National University) ;
- Jeon, Jae-Hong (School of Electrical Engineering, Seoul National University) ;
- Yoo, Juhn-Suk (School of Electrical Engineering, Seoul National University) ;
-
Han, Min-Koo
(School of Electrical Engineering, Seoul National University)
- 발행 : 2000.01.13
초록
We propose a new in-situ fluorine passivation of poly-Si TFTs by excimer laser annealing to reduce the trap density and improve the reliability significantly. This improvement is due to the formation of stronger Si-F bonds than Si-H bonds which passivate the trap states.
키워드