초록
Growth characteristics of silica particles have been studied experimentally using in situ sampling technique from $H_2/O_2TEOS$ diffusion flame with carefully devised sampling probe. Verification of sampling result was done through new method and effects of flame condition and TEOS flow rate on growth characteristics of silica particles were investigated. By comparing particles sampled by thermophoretic sampling in flame with those by collector sampling after probe, particles do not change before and after probe sampling, which was clearly proved from the fact that the result of TEM image analysis makes good agreement with that of SMPS measurement. As flame temperature increases, the effect of coalescence or sintering becomes important mechanism during growth of silica particles, resulting in canceling the effect of coagulation, which makes mean diameter of silica particles increase slowly. With increase in TEOS flow rate, the number concentration of generated silica particle increases but residence time of particles in flame decreases. As a result, there exists upper limit to which the diameter of silica particle increases under same flame condition.
