대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2000년도 추계학술대회논문집A
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- Pages.548-553
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- 2000
자기베어링의 실시간 정밀제어를 위한 원통형 정전용량 변위센서의 새로운 설계
New Design of Cylindrical Capacitive Sensor for On-line Precision Control of AMB Spindles
- 발행 : 2000.11.02
초록
A new design of cylindrical capacitive sensor(CCS) for the displacement measurement of precision active magnetic bearing(AMB) spindle is presented in this paper. This research is motivated by the problem that existing 4-segment CCS is still sensitive to the
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