Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2000.05a
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- Pages.1043-1046
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- 2000
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- 2005-8446(pISSN)
LIGA Technology and Its Application to Micro-molding
초소형 정밀 가공 기술 및 이를 이용한 정밀 사출품 제작 기술
Abstract
By combination of X-ray lithography, electroplating and molding process, various microstructures have been produced. Specially, the alignment grooves for multi-fibers with submicron accuracy have been produced. This paper described a fabrication process of LICA molds and micro molding technique by using LIGA molds. The accuracy of the fabricated LIGA molds was less than 0.4