초소형 정밀 가공 기술 및 이를 이용한 정밀 사출품 제작 기술

LIGA Technology and Its Application to Micro-molding

By combination of X-ray lithography, electroplating and molding process, various microstructures have been produced. Specially, the alignment grooves for multi-fibers with submicron accuracy have been produced. This paper described a fabrication process of LICA molds and micro molding technique by using LIGA molds. The accuracy of the fabricated LIGA molds was less than 0.4${\mu}{\textrm}{m}$. The injection molded alignment grooves were very precise and had me surface roughness so that they could be successfully applicable to optical systems.