한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2000년도 춘계학술대회 논문집
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- Pages.959-962
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- 2000
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- 2005-8446(pISSN)
고속 회전에칭을 이용한 미세공구의 개발
Development of Micro Tool using High Speed Etching Process
초록
In this study, the micro shaft was fabricated by high speed etching process. The integration of the kinetic energy of circumference and the effect of etching takes less time to fabricate the micro shaft than any other conventional methods. First, the end part of the rod(SKD11) was dipped in chemical solution(FeCl
키워드