Fabrication and Characteristics of Microlens using Thermal Reflow Method

Thermal Reflow법에 의한 마이크로렌즈의 제작 및 그 특성

We studied the characteristics and fabricated the plano-convex refractive microlenses using the thermal reflow method. The exposed resist was resolved in a standard developing process. The remaining resist of circle pattern was melted in an oven 12$0^{\circ}C$ to 15$0^{\circ}C$. The shape of the melted resist microlenses is ruled by surface tension. Diameter and hight of the fabricated microlenses were 250${\mu}{\textrm}{m}$ to 325${\mu}{\textrm}{m}$ and 15${\mu}{\textrm}{m}$ to 22${\mu}{\textrm}{m}$, respectively. The surface profile was calculated using data curve-fitting method with circle equation. The optical characteristics was analysed using optical simulation program.