Temperature Control of a Test Plate for Semiconductor Using a Cooler and a Heater

Cooler와 Heater를 이용한 반도체 시험용 Plate의 온도제어

In this paper, a temperature controller of a test plate for semiconductor is developed using LQG/LTR methodology. The liquid is heated or cooled in a tank by a heater of a cooler. The controller controls the flow of heated or cooled liquid in the plate by controling an electronic valve. The developed controller is applied to the plate designed for function test of a semiconductor under high or low temperature environment. As a result, control using the heater and the cooler together shows better control performance than using the heater or the cooler separately.