한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2000년도 추계학술대회 논문집
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- Pages.40-44
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- 2000
OES를 이용한 SBT 박막의 식각 메카니즘 연구
The Study Of Etching Mechanism in $SrBi_{2}Ta_{2}O_{9}$ thin film by Optical Emission Spectroscopy
초록
In this paper, since the research on the etching of SrBi