Analysis of Surface Profile using Gap Sensor

Gap 센서를 이용한 가공물의 표면특성 분석

Surface roughness measurement system with capacitance type gap sensor. Tentative result from the calibration measurement showed the potential applicability of the sensor to the processed specimen. In order to test the sensitivity of the measurement system, several parameters including valley depth, width of the specimen have been changed. Effect of the charge area between sensor and specimen surface has been also analyzed.