• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 추계학술대회논문집 - 한국공작기계학회
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• pp.304-308
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• 2000

Surface roughness measurement system with capacitance type gap sensor. Tentative result from the calibration measurement showed the potential applicability of the sensor to the processed specimen. In order to test the sensitivity of the measurement system, several parameters including valley depth, width of the specimen have been changed. Effect of the charge area between sensor and specimen surface has been also analyzed.