한국마이크로전자및패키징학회:학술대회논문집 (Proceedings of the International Microelectronics And Packaging Society Conference)
- 한국마이크로전자및패키징학회 2000년도 Proceedings of 5th International Joint Symposium on Microeletronics and Packaging
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- Pages.111-111
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- 2000
The Effect of Kovar(Fe-29Ni-l7Co) Oxidation Atmosphere on the Kovar-to-Glass Seal
- Kim, Buoung-Soo (Ceramic Eng. Hanyang Univ.) ;
- Kim, Min-Ho (Ceramic Processing Research Center KIST) ;
- Park, Duck-Kyun (Ceramic Eng. Hanyang Univ.) ;
- Son, Yong-Bei (Ceramic Processing Research Center KIST)
- 발행 : 2000.04.01
초록
In order to form a uniform oxidation layer and spinel crystalline phase that has been help strong bonding in Kovar(Fe-29Ni-17Co)-to-glass sealing, the humidified nitrogen and nirtogen/hydrogen mixture was used as an oxidation atmosphere. Kovar oxidation was diffusion-controlled reaction and the activation energy was 25~32 kcal/mol at
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