한국해양공학회:학술대회논문집 (Proceedings of the Korea Committee for Ocean Resources and Engineering Conference)
- 한국해양공학회 2000년도 추계학술대회 논문집
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- Pages.84-89
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- 2000
SPM의 동적해석 S/W 개발
Development of SPM Dynamic Analysis Software
초록
Thermal simulation of typical stack-type and newly proposed planar-type micro-gas sensors were studied by FEM method. The thermal analyses for the proposed planar structure including temperatur distribution over the sensing layer and power consumption of the heater were carried using finite element method by computer simulation and well compared with those of typical stack-type micro-gas sensor. The thermal properties of the microsensor from thermal simulation were compared with those of a actual device to investigate the acceptability of the computer simulation.