한국항해항만학회:학술대회논문집 (Proceedings of the Korean Institute of Navigation and Port Research Conference)
- 한국항해항만학회 2000년도 추계학술대회논문집
- /
- Pages.29-32
- /
- 2000
유도 결합 플라즈마($Cl_2/Ar$ )를 이용한 $CeO_2$ 박막의 식각 특성 연구
A Study on the Etching Characteristics of $CeO_2$ Thin Films using inductively coulped $Cl_2/Ar$ Plasma
초록
Cerium oxide thin film has been proposed as a buffer layer between the ferroelectric film and the Si substrate in Metal-Ferroelectric-Insulator-Silicon (MFIS ) structures for ferroelectric random access memory (FRAM) applications. In this study, CeO