난반사형 광삼각법 변위 센서의 모델링 및 거동 해석

Modeling and Analysis of Diffuse-type Optical Triangulation Displacement Sensor

Optical triangulation displacement sensors(0TDSs) are widely used for their simple struchlre, high resolution, and long operating range. However, there are several factors that must be taken into account in order to obtain high accuracy and reliability Measurement errors from inclinations a？ an object surface, prohe signal fluctuations generated by speckle effects. power vanation of a light source, electronic noises, and so on. Previous models of OTDSs can not show reasonable behavior as change of surface inclination and shape of light intensity distribution on the detector. In this paper, we propose a new and reasonable modeling for diffise-type OTDSs based on a geometrical optics. To verify propriety of new modeling, we take basic experiments. Shape of light intensity distribution is asymmetric in both simulation result and experimental result. Both simulation result and experimental result show same tendency of light intensity distribution movement as changing surface inclination