• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.6
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• pp.1030-1035
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• 1992

This paper presents a non-contact type displacement sensor designed based on optical triangulation method. The optical principles of the sensor are described in detail with aids of paraxial geometric optics. A prototype sensor is designed and fabricated by using modern optoelectronic hardware. Its measuring performances are evaluated and discussed through a series of calibration processes.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.41-45
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• 1996

비접촉방법데 의한 변위 측정기술은 공작물의 가공중(in-process)형상치수의 측정 또는 각종 계 측에 대한 자동화기술의 필요성이 증대됨에 따라 다양한 원리를 응용하여 발전되고 있다. 전통적인 방법으로는 가변 리럭턴스(variable reluctance)형, 와전류(eddy current)형, 콘덴서(capacitance)형 등의 전기적 센서들이 주를 이루고 있으나 최근에 들어서는 광전자기술의 발달에 힘입어 여러 광학 측정법들이 연구되어 실용화 되고 있다. 본 연구에서는 측정자동화 용도로 사용될 수있는 광삼각법에 의한 비접촉방식의 광학센서에 대한 기본 연구 결과를 서술하였다. 광삼각 비접촉 측정의 기본 원리와 측정 범위 및 분해능 관점에서의 센서 설계의 기본 방법을 제시하며 또한, 실제적인 센서의 설계 및 제작을 위해 응용될 수 있는 기본광학소자의 현 기술적 수준과 성능을 기술하였다. 최종적으로는 실제적인 센서의 설계제작 과정과 시제품의 성능 실험을 통한 응용 가능성이 검토되었다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.43-46
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• 2000

Optical triangulation displacement sensors(0TDSs) are widely used for their simple struchlre, high resolution, and long operating range. However, there are several factors that must be taken into account in order to obtain high accuracy and reliability Measurement errors from inclinations a？ an object surface, prohe signal fluctuations generated by speckle effects. power vanation of a light source, electronic noises, and so on. Previous models of OTDSs can not show reasonable behavior as change of surface inclination and shape of light intensity distribution on the detector. In this paper, we propose a new and reasonable modeling for diffise-type OTDSs based on a geometrical optics. To verify propriety of new modeling, we take basic experiments. Shape of light intensity distribution is asymmetric in both simulation result and experimental result. Both simulation result and experimental result show same tendency of light intensity distribution movement as changing surface inclination

• Journal of the Korean Society for Precision Engineering
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• v.16 no.7
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• pp.40-50
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• 1999

Recently, a laser displacement sensor is widely used for the manufacturing automation. The sensor is generally composed of a diode laser and a light receiving device. The diode laser emits a laser beam and the receiving device detects the light reflected from the measured object. The object position is obtained based upon triangulation method. As a light receiving device, a PSD is usually utilized since its structure is very simple and rugged and has a high accuracy. Although the theoretical relationship for this sensor had been developed, the characteristics of the sensor have not been much experimentally studied. In this paper, several experimental results will presented. The measurement accuracy is affected by the surface conditions such as the reflectance characteristics, the angle of the object's surface and the laser intensity. In addition, it is found that the PSD and the signal processing circuit have nonlinearities and showed that those nonlinearities can be reduced by controlling the emitting laser intensity.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.8
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• pp.40-47
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• 2001

Optical measurement methods make it possible to detect object displacements with high resolution and noncontact measurements. Also, they are very robust against EMI noises and have long operation range. An optical triangulation sensor is one of widely used displacement measurement sensors for its sub-micron resolution, fast response, simple structure, and low cost. However. there are several errors caused by inclinations of a surface. speckle effects, power fluctuations of light sources, and noises of detectors. In this paper, in order to minimize error effects, we performed error analysis and proposed a new structure. Then, we setup a new modeling method and verify it through simulations and experiments. Based on the new model. we propose a new sensor structure and establish design criteria. Finally, we design a signal processing system to overcome a resolution-limited problem of light detectors. The resolution of the proposed system is 0.2${\mu}{\textrm}{m}$ in 5mm operating range.