A study on multi degrees of freedom fine motion measurement for milli-structure

밀리구조물의 다자유도 미세 변위 측정법에 대한 연구

Cutrent technological development toward miniaturization requires smaller components. These components usually generate complex multi-DOF motions other than simple 1-DOF motlon. Therefore it is essential to develop measurement methodology for 6-DOF motions. In this paper, a new 6-DOF measurement system for milli-struchlre is presented. This methodology basically employs the Optical Beam Deflection Method (OBDM) with a diffraction grating. A laser beam is emitted toward the difliaction grating which could be attached on the surface of a milli-structue and the incident ray is dif'||'&'||'acted in several directions. Among these difliacted beams, $0^{th}$ and $\pm$ $1^{th}4" order difkicted rays are detected by 4 Quadrant Photodiodes. From coordinate values fram each detector, we can get information for 6-DOF motions with lineariration method, Required resolutions for milli-struchue measurement are suh-micrometer in translation and arcsec in rotation. Experimental results indicate that proposed system has possibility to satisfy this requirement.