정밀 혐진기기 방.제진을 위한 바닥 진동성능평가에 관한 연구

Evaluation on the Floor Vibration Characteristics for the Vibration Control of Vibration Sensitive Equipments

In this paper we present an overview of the factors and techniques that must be considered in vibration measurements in the floor structures for microelectronics facilities. Normally narrowband vibration spectrum or equivalent signals are suggested as the guide indexes of site vibration phenomina. But it cannot support perfect informations in designing vibration control systems for the vibration sensitive equipment even though the spectrum serves to illustrate the fact that most real vibration environments are dominated by broadband energy as opposed to tonal energy. The major topics cover stiffness in frequency and time domain, acceleration level and modal characteristics from experimental modal analysis as well as narrowband spectrum. The combined signal analysis through the items mentioned above can give better solutions and would be positively recomended to solve the vibration problems on a sort of limited field.