Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2000.07c
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- Pages.2233-2235
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- 2000
The Characteristics for the Electrostatically Actuated z-Shaped Laterally Driven MEMS Switch
정전 구동 수평 거동 z-형 MEMS 스위치의 특성
- Hong, Young-Tack (Dept. of Mechanical Engineering, Sogang Univ.) ;
- Oh, Jae-Geun (Dept. of Mechanical Engineering, Sogang Univ.) ;
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Choi, Bum-Kyoo
(Dept. of Mechanical Engineering, Sogang Univ.)
- Published : 2000.07.17
Abstract
We present the characteristics of microwave and mechanical behavior for the electrostatically actuated z-shaped laterally driven micriomachined CPW SPST(Single Pole Single Throw) Switch, which is for the application of the microwave communication systems. In this paper, we have aimed to maintain advantages. such as low insertion loss and low power consumption that the previously developed RF MEMS Switch has and minimize also stiction problem. enhance the microwave characteristics by etching of substrate beneath the switch, realize the pull-in voltage of below 30V. The optimized design parameters of the MEMS Switch can be selected by the analysis of the mechanical behavior and the use of ANSYS simulation method.
Keywords