Modified melt-textured growth 법으로 제작한 타겟을 사용한 YBCO 박막의 펄스레이저 증착

Pulsed laser deposition of YBCO thin films using modified melt-textured grown targets

  • 김창훈 (한국과학기술원, 초전도연구팀) ;
  • 김인태 (한국과학기술연구원, 세라믹스연구부) ;
  • 홍국선 (서울대학교) ;
  • 김영환 (한국과학기술연구원, 초전도연구팀) ;
  • 최상삼 (한국과학기술연구원, 초전도연구팀) ;
  • 한택상 (한국과학기술연구원, 초전도연구팀)
  • Kim, Chang-Hoon (Korea, Superconductivity Research Laboratory, Korea Institute of Science and Technology) ;
  • Kim, In-Tae (Division of Ceramics, Korea Institute of Science and Technology) ;
  • Hong, Kug-Sun (Seoul National University) ;
  • Kim, Young-Hwan (Korea, Superconductivity Research Laboratory, Korea Institute of Science and Technology) ;
  • Choi, Sang-Sam (Korea, Superconductivity Research Laboratory, Korea Institute of Science and Technology) ;
  • Hahn, Taek-Sang (Korea, Superconductivity Research Laboratory, Korea Institute of Science and Technology)
  • 발행 : 1999.08.18

초록

Ba$_2Cu_3O_{7-{\delta}}$ (YBCO) thin films were deposited by pulsed laser deposition using differently prepared targets: One was a conventionally solid-state sintered (SSS) target and the other was a modified melt-textured grown (MTC) target. Compared with SSS targets, MTG targets showed a well-connected microstructure consisting of much larger grains and the surface was Bess roughened with the cumulative laser incidence. YBCO films deposited from MTC targets showed a denser and smoother surface of the basal film than the case of SSS targets. The investigations of ${\alpha}$-axis outgrowths in the films indicated that the deposition using MTG targets would result in a more homogeneous and stable film growth as compared to the SSS targets. Also, TEM analysis revealed that the film deposited from MTG targets had a less granular microstructure that would reduce weak-link effects in the film.

키워드