$SF_6$+He 혼합기체의 MCS-BE에 의한 전자수송계수 연구

Study on the electron transport properties in $SF_6$+He mixtures gas used by MCS-BE

This paper describes the electron transport characteristics in $SF_6$+He gas calculated for range of E/N values from $50{\sim}700[Td]$ by the Monte Carlo simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained by TOF method. The results gained that the values of the electron swarm parameters such as the electron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients agree with the experimental and theoretical for a range of E/N.