Study on the structure of buried type capacitor for MCM (Multi-Chip-Module)

MCM-C(Multi-Chip-Module)용 내장형 캐패시터의 구조적 특성에 관한 연구

  • Yoo, C.S. (Korea Electronics Technology Institute) ;
  • Lee, W.S. (Korea Electronics Technology Institute) ;
  • Cho, H.M. (Korea Electronics Technology Institute) ;
  • Lim, W. (Korea Electronics Technology Institute) ;
  • Kang, N.K. (Korea Electronics Technology Institute) ;
  • Park, J.C. (Korea Electronics Technology Institute)
  • Published : 1999.11.01