Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1999.05a
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- Pages.430-433
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- 1999
An investigation of electrical characteristics of MPPO(Modified-Polyphenylene Oxide) by gas ion implantion
가스이온 주입에 의한 MPPO의 전기적 특성조사
Abstract
MPPO(Modified-Polyphenylene Oxide) was irradiated with helium, nitrogen, and argon ions at the ion energy of 50 keV and 70 keV from the dose region of 5