Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1999.05a
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- Pages.109-112
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- 1999
A study on the Ferroelectric Properties of PZT(10/90)/(90/10) Heterolayered Thin Films
PZT(10/90)/(90/10)이종층 박막의 강유전특성에 관한 연구
Abstract
The PZT(10/90)/(90/17) heterolayered thin films were fabricated by the spin-coaling on the Pt/Ti/SiO