• Title/Summary/Keyword: Dielectrict constant

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A study on the Ferroelectric Properties of PZT(10/90)/(90/10) Heterolayered Thin Films (PZT(10/90)/(90/10)이종층 박막의 강유전특성에 관한 연구)

  • 김경태;박인길;이성갑;이영희
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.05a
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    • pp.109-112
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    • 1999

  • The PZT(10/90)/(90/17) heterolayered thin films were fabricated by the spin-coaling on the Pt/Ti/SiO$_2$/Si substrate using the PZT(10/90) and PZT(70/10) metal alkoxide solutions. The effect of heterolayered thin films on the ferroelectrics and electrical properties have been investigated. The lower PZT layers provided the nucleation site for the formation of a perovskite phase of the upper PZT films. Dielectric constant increased with increasing the number of coatings, and it was about 569.9 at PZT-6 heterolayered films.

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