한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1999년도 추계학술대회 논문집
- /
- Pages.358-361
- /
- 1999
매개층 산화마그네슘막을 이용한 백금박막 미세발열체의 제작과 마이크로 유량센서에의 응용
Fabrication of Micro-heaters Using MgO as Medium Layer and It`s Application for Micro-Flowsensors
초록
This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD\`s and micro-heater on the Si substrate, in which MgO thin-films were used as medium layer in order to improve adhesion of Pt thin-films to SiO