한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1999년도 추계학술대회 논문집
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- Pages.354-357
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- 1999
Si기판상에 제작된 박막형 백금 측온저항체 온도센서의 특성
Characteristics of Thin-film Type Pt-RTD's Fabricated on Si Wafers
초록
This paper describes on the electrical and physical charateristics thin-film type Pt-RTD\\`s on Si wafers, in which MgO thin-films were used as medium layer in order to improve adhesion of Pt thin-films to SiO