대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1999년도 하계학술대회 논문집 D
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- Pages.1928-1930
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- 1999
열선 CVD법에 의한 수소화된 미세결정 실리콘 박막 증착
Hot Wire Chemical Vapor Deposition of Hydrogenated Microcrystalline Silicon Films
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이정철
(한국에너지기술연구소 태양광발전연구팀) ;
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강기환
(한국에너지기술연구소 태양광발전연구팀) ;
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김석기
(한국에너지기술연구소 태양광발전연구팀) ;
-
윤경훈
(한국에너지기술연구소 태양광발전연구팀) ;
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송진수
(한국에너지기술연구소 태양광발전연구팀) ;
- 박이준 (한국에너지기술연구소 태양광발전연구팀)
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Lee, Jeong-Chul
(Photovoltaic Research Team, Korea Institute of Energy Research) ;
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Kang, Ki-Whan
(Photovoltaic Research Team, Korea Institute of Energy Research) ;
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Kim, Seok-Ki
(Photovoltaic Research Team, Korea Institute of Energy Research) ;
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Yoon, Kyung-Hoon
(Photovoltaic Research Team, Korea Institute of Energy Research) ;
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Song, Jin-Soo
(Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Park, I-Jun (Photovoltaic Research Team, Korea Institute of Energy Research)
- 발행 : 1999.07.19
초록
This paper describes on the growth of a
키워드