Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Electrochemical Characteristics on the Preparation of Porous Silicon

다공성 실리콘의 제조서 전기화학적 특성

  • Kim, D.I. (Korea Institute of Energy Research, Korea University) ;
  • Lee, C.H. (Korea Institute of Energy Research, Korea University) ;
  • Jung, D.H. (Korea Institute of Energy Research, Korea University) ;
  • Kim, C.S. (Korea Institute of Energy Research, Korea University) ;
  • Shin, D.R. (Korea Institute of Energy Research, Korea University) ;
  • Lee, C.W. (Korea Institute of Energy Research, Korea University)
  • 김동일 (한국에너지기술연구소 연료전지팀) ;
  • 이창형 (한국에너지기술연구소 연료전지팀) ;
  • 정두환 (한국에너지기술연구소 연료전지팀) ;
  • 김창수 (한국에너지기술연구소 연료전지팀) ;
  • 신동열 (한국에너지기술연구소 연료전지팀) ;
  • 이치우 (고려대학교 자연과학부)
  • Published : 1999.07.19
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Abstract

Porous silicon were prepared under various anodization condition on n-Si substrates. Chronoamperometric curves of porous silicon depended on potentials, composition and temperature of electrolytes. and intensity of UV irradiation. Anodic current density decreased continuously at low potential $(\leq0.5V)$ but increased at high potentials (>2V vs. Ag QRE). the difference in chronoamperometric curve is due to different activation energy in the processes involved in porous silicon formation.

Keywords