폴리이미드 유기초박막의 유전특성에 관한 연구

A study on the Dielectric Characteristics of Polyimide Organic Ultra Thin Films

  • 전동규 (동신대학교 대학원 전기전자공학과) ;
  • 이경섭 (동신대학교 공과대학 전기전자공학과)
  • Chon, D.K. (Dept. of Electrical & Electronic Eng. Dongshin Univ.) ;
  • Lee, K.S. (Dept. of Electrical & Electronic Eng. Dongshin Univ.)
  • 발행 : 1999.07.19

초록

In this paper, we give pressure stimulation into organic ultra thin films and detected the induced displacement current properties, and then manufacture a device under the accumulation condition. In processing of a device manufacture, we can see the process is good from the change of a surface pressure and transfer ratio of area per molecule of organic ultra thin films. The structure of manufactured device is MIM(Au/polyimide LB films/AU), the number of accumulated 19 layers. I-V characteristic of the device is measured from -5[V] to +5[V]. The maximum value of measured current is increased as the number of accumulated layers are decreased. The insulation of a thin film is better as the interval between electrodes is larger, and the insulation properties of a thin film is better as the distance between electrodes is larger.

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