대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1999년도 하계학술대회 논문집 G
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- Pages.3331-3333
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- 1999
다결정 실리콘 마이크로머시닝 제작 시 폴리머 지지를 이용한 옆 방향 정착방지 방법의 제안
A New Antistiction Method Using Polymer Suspension for Fabrication with Polysilicon Micromachining
- Lim, Hyung-Taek (Lab for Micro Sensors & Actuators, School of Electrical Engineering, Seoul National University) ;
- Yoon, Choong-Hyun (Lab for Micro Sensors & Actuators, School of Electrical Engineering, Seoul National University) ;
- Kim, Yong-Kweon (Lab for Micro Sensors & Actuators, School of Electrical Engineering, Seoul National University)
- 발행 : 1999.07.19
초록
A novel antistiction method using photo resist is proposed and verified to improve the yield of polysilicon micromachining process.
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