대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1999년도 하계학술대회 논문집 G
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- Pages.3328-3330
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- 1999
마이크로 전자석과 자기변형박막을 이용한 마이크로 엑추에이터의 제작
The Fabrication of Micro Actuator Used Micro Electro-Magnet and Magnetostrictive Thin Film
- Seo, Jee-Hoon (School of Electronics Eng, Ajou University) ;
- Yang, Sang-Sik (School of Electronics Eng, Ajou University) ;
- Jeong, Jong-Man (Research Center for Thin film Technology, KIST) ;
- Lim, Sang-Ho (Research Center for Thin film Technology, KIST)
- 발행 : 1999.07.19
초록
In this paper, the fabrication of a micro actuator with a micro electromagnet and an actuator diaphragm is presented. The micro electromagnet consists of a magnetic core and a micro inductive planar coil. The actuator diaphragm is the p+ silicon diaphragm on both sides of which magnetostrictive materials are deposited by sputtering. The micro electromagnet is fabricated by sputtering, evaporating, etching and electroplating. The magnetic flux density of the micro electromagnet is measured by using the gauss meter. The deflection of the actuator diaphragm is measured by using the laser vibrometer and optic microscope.
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