대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1999년도 하계학술대회 논문집 G
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- Pages.3322-3324
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- 1999
마이크로 렌즈가 집적된 2-자유도 평면구동기의 설계 및 제작
Integration of a micro lens on a in-plane positioning actuator with 2-DOF
- Kim, Che-Heung (Seoul National University) ;
- Kim, Yong-Kweon (Seoul National University)
- 발행 : 1999.07.19
초록
This paper studies on the design and fabrication of a micro in-plane positioning actuator integrated with a microlens. Proposed in-plane actuator is a micro XY-stage which is composed of two linear comb drive actuators being orthogonal to each other. In the fabrication of actuator, the single crystalline silicon substrate anodically bonded with a #7740 glass substrate is used because of simple release and passivation. The structure of actuator is formed on the silicon facet of bonded fixture by chlorine-based deep RIE and then released by isotropic wet etching of glass (#7740) in hydrofluoric acid solution. Fabricated actuator has a large travel range up to
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