대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1999년도 하계학술대회 논문집 G
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- Pages.3319-3321
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- 1999
MgO 매개층을 이용하여 제작된 유량센서의 특성
The Characteristics of Flow Sensor Fabricated by MgO Medium Layer
- Hong, Seok-Woo (School Of information and communcation Eng, DongSeo Univ.) ;
- Jang, Soo (School Of information and communcation Eng, DongSeo Univ.) ;
- Lee, Jong-Chun (School of Mechancal Eng) ;
- Chung, Gwiy-Sang (School Of information and communcation Eng, DongSeo Univ.)
- 발행 : 1999.07.19
초록
Pt-RTD and Micro Heater was fabricated by using MgO as medium layer in order to improve adhesion of Pt thin-films to
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