대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

MgO 매개층을 이용하여 제작된 유량센서의 특성

The Characteristics of Flow Sensor Fabricated by MgO Medium Layer

  • 홍석우 (동서대학교 정보통신공학부) ;
  • 장수 (동서대학교 정보통신공학부) ;
  • 이종춘 (경남정보대학 기계시스템학부) ;
  • 정귀상 (동서대학교 정보통신공학부)
  • Hong, Seok-Woo (School Of information and communcation Eng, DongSeo Univ.) ;
  • Jang, Soo (School Of information and communcation Eng, DongSeo Univ.) ;
  • Lee, Jong-Chun (School of Mechancal Eng) ;
  • Chung, Gwiy-Sang (School Of information and communcation Eng, DongSeo Univ.)
  • 발행 : 1999.07.19
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초록

Pt-RTD and Micro Heater was fabricated by using MgO as medium layer in order to improve adhesion of Pt thin-films to $SiO_2$ layer, MgO layer improved adhesion of Pt thin-films to $SiO_2$ layer without any chemical reactions to Pt thin-films under high annealing temperatures, In the analysis of properties of Pt-RTD, TCR value had 3927 $ppm/^{\circ}C$ and liner in the temperature range of $25-400^{\circ}C$. The temperature of Pt micro-heater had up to $400^{\circ}C$ with 1.5watts of the heating power. In investigating output characteristics of flow sensors output voltages increased as gas flow rate and its conductivity increased due to increase of heat-loss from sensor to external. Output voltage was 82 mV at $N_2$ flow rate of 2000sccm, heating power of 1.2W.

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