Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.11c
- /
- Pages.1001-1003
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- 1998
Analysis of single/poly crystalline Si etching characteristics using $Ar^+$ ion laser
$Ar^+$ ion laser를 이용한 단결정/다결정 Si 식각 특성 분석
- Lee, Hyun-Ki (Department of Electricai Engineering, Korea University) ;
- Park, Jung-Ho (Department of Electricai Engineering, Korea University) ;
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Lee, Cheon
(Department of Electrical Engineering, Inha University)
- Published : 1998.11.28
Abstract
In this paper,
Keywords