제어로봇시스템학회:학술대회논문집

Institute of Control, Robotics and Systems (제어로봇시스템학회)
권호 표지

Area Usage Factor Analyzing Method for Semi-conductor Manufacturing Process

  • Konishi, Katunobu (Department of Mechnanical Engineering, Tokushima University) ;
  • Ukida, Hiroyuki (Department of Mechnanical Engineering, Tokushima University) ;
  • Sawada, Koutarou (Department of Mechnanical Engineering, Tokushima University)
  • Published : 1998.10.01
Download PDF
⟨ Previous Next ⟩

Abstract

For memory products, it is very important to develop a new production line as soon as possible. All products are inspected to get rid of defected products at the last testing stage. Those inspection data are called FCM. In this paper, based on the FCM data, Area Usage Factor (AUF) analyzing method will be proposed. Process engineers can make up their mind to which direction they should concentrate their analyzing power.

Keywords