Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1998.11a
- /
- Pages.155-158
- /
- 1998
The simulation of electrons swarm parameter in He gas is used by Boltzman equation
볼츠만 방정식을 이용한 Helium 가스의 전자군 파라미터 시뮬레이션
Abstract
This paper is calculated at electron swarm simulation by Back Prolongation of Boltzmann equation for range of E/N values from 0.1~200[Td], pressure P= 1.0[Torr], temperature T=300[ 。K], the electron swarm parameter(drift velocity, longitudinal . transverse diffusion coefficients, characteristic energy, etc) in He gas is used by electron collision cross section, particularly explicate the simulation technique, and consider electrical conduction characteristic of He gas.
Keywords