Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 1998.05a
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- Pages.38-38
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- 1998
The synthesis of Ti(C,N) and Zr(C,N) films by the PE-MOCVD and diagonostics of glow discharge
PE-MOCVD법에 의한 Ti(C,N)박막파 Zr(C,N)박막의 합성과 방전특성
Abstract
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