Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.152.4-152
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- 1998
GROWTH AND CHARACTERIZATION OF RF MAGNETRON SPUTTERED $AIn/Sio_2/Si(100)$ THIN FILMS
- Kim, Hyung-T. (Dept. of Matl's Sci. & Eng., Univ. of Inchon) ;
- Whang, J.H. (Dept. of Physics. Univ. of Inchon) ;
- Chung, W.H. (Dept. of Physics. Univ. of Inchon) ;
- Choi, S.Y. (Dept. of Physics. Univ. of Inchon) ;
- Park, I.H. (Dept. of Physics. Univ. of Inchon) ;
- Kwon, M.H. (Dept. of Physics. Univ. of Inchon)
- Published : 1998.08.01
Abstract
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