Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.152.3-152
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- 1998
PROPERTIES OF AMORPHOUS WNx THIN FILMS PREPARED BY RF MAGNETRON SPUTTRING
- Han, K.Y. (School of Mat. & Met. Eng, Kumoh National University of Technology) ;
- Choi, Byung-Ho (School of Mat. & Met. Eng, Kumoh National University of Technology)
- Published : 1998.08.01
Abstract
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