A NEW CLASS OF SINGLE SOURCES FOR THE CHEMICAL VAPOR DEPOSITION OF HETERO-METALLIC OXIDES

  • Koh, W. (Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
  • Ku, S.J. (Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
  • Kim, C.G. (Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
  • Yu, K.S. (Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
  • Kim, Y. (Advanced Materials Division, Korea Research Institute of Chemical Technology)
  • Published : 1998.08.01