Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.90.1-90
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- 1998
MULTILAYERED TANTALUM-ALUMINIUM OXIDE FILMS GROWN BY ATOMIC LAYER DEPOSITION
- Kim, Yong-S. (Semiconductor Technology Division, Electronics and Telecommunications Research Institute) ;
- Kang, J.S. (Semiconductor Technology Division, Electronics and Telecommunications Research Institute) ;
- Yun, S.J. (Semiconductor Technology Division, Electronics and Telecommunications Research Institute) ;
- Park, M.C. (Semiconductor Technology Division, Electronics and Telecommunications Research Institute) ;
- Nam, K.S. (Semiconductor Technology Division, Electronics and Telecommunications Research Institute)
- Published : 1998.08.01
Abstract
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