Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.77.3-77
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- 1998
EFFECT OF VACUUM ANNEALING OF MOCVD TiN ON THE DIFFUSION BARRIER PROPERTY
- Lee, Jae-Gab (Dept. of Metallurical Eng. Kookmin Univ.) ;
- Cho, Heung-Lyul (Dept. of Metallurical Eng. Kookmin Univ.) ;
- Cho, Heung-Yul (Dept. of Metallurical Eng. Kookmin Univ.) ;
- Lee, Eun-Gu (Dept. of Metallurical Eng. Kookmin Univ.) ;
- Kim, Ki-Bum (Dept. of Metallurical Eng. Kookmin Univ.)
- Published : 1998.08.01
Abstract
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