Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.107.4-107
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- 1998
A STUDY ON THE EFFECT OF METALLIC IMPURITIES ON MICROROUGHNESS OF SI WAFER
- Choi, Hyung-Seok (Semiconductor Materials Laboratory, Division of Materials Science Engineering, Hanyang University) ;
- Jeon, Hyeong-Tag (Semiconductor Materials Laboratory, Division of Materials Science Engineering, Hanyang University)
- Published : 1998.08.01
Abstract
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