Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
- /
- Pages.107.3-107
- /
- 1998
ELECTROCHEMICAL AND PHOTOELECTROCHEMICAL ETCHING OF N-TYPE SILICON
-
Lee, Chi-Woo
(Dept. of Chemistry, Korea University)
;
- Kim, Dong-Il (Dept. of Chemistry, Korea University) ;
-
Kim, Buem-Suck
(Dept. of Chemistry, Korea University)
;
-
Min, Nam-Ki
(Dept. of Control and Instrumentation Engineering, Korea University)
- Published : 1998.08.01
Abstract
Keywords