한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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- Pages.105.1-105
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- 1998
SELECTIVE CHARACTERIZATION AND COMPLETE PLAHARIZATION OF PLUG WITH ALUMINUM BY CYCLE CHEMICAL VAPOR DEPOSITION
- Ahn, Seong-Deok (Dept. of Materials Science & Engineering, KAIST) ;
- Kang, Sang-Won (Dept. of Materials Science & Engineering, KAIST)
- 발행 : 1998.08.01