Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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EFFECT OF THE FLUORINE TREATMENT FOR THE ANTI-CORROSION OF Al(1% Cu) FILMS AFTER PLASMA ETCHING

  • Kim, Tae-H. (Dept. of Elect. Yeojoo Technical Collage) ;
  • Seo. Y.J. (School of Elect. Eng. Daebool Univ.) ;
  • Kim, C.I. (Dept. of Elect. Eng, Chungang Univ.) ;
  • Chang, E.G. (Dept. of Elect. Eng, Chungang Univ.)
  • Published : 1998.08.01
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